Optical and EUV Lithography - A Modeling Perspective - Andreas Erdmann - Paperback Bog - SPIE Press - 2021 - Engelsk - Booktok.dk

Description

Introduces interested students with backgrounds in physics, optics, computational engineering, mathematics, chemistry, material science, nanotechnology, and other areas to the fascinating field of lithographic techniques for nanofabrication. It should also help senior engineers and managers expand their knowledge of alternative methods and applications.